- Fully-automated,cassette-to- cassette handling
- Single wafer processing for excellent wafer-to-wafer control
- Single-side and two-sided polish
- Three tables with dedicated carriers, pad conditioners, and pad cleaners
- Acid-resistant components
- OCR (optional)
- State-of-the-art control architecture and Windowsbased operating system
- Two standard slurry delivery lines, optional third slurry line available
- Factory host communication(optional)
- SEMI S2, S8, and CE certified
- 50-wafer processing without operator intervention
- Integrated post-polish clean
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