The production system Tetra 140, with its 140-litrechamber volume and PC control, is used in series production (cleaning, etching,activation and plasma polymerization).
Special plasma system Tetra 140-LF-PC
Technical data:
Switch cabinet:
W 600 mm, H 2100 mm, D 650 mm
Chamber:
W 1200 mm, H 700 mm, D 1500 mm
Chamber volume:
approx. 140 litres
Gas supply:
3 gas channels via MFCs
Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
Control
PC control (Windows) with industrial field bus
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